Asymmetric pass field-effect transistor for non-volatile memory

ABSTRACT

A method of performing an operation on a non-volatile memory (NVM) cell of a memory device is disclosed. The pass transistor of the NVM cell is an asymmetric transistor including a source with a halo implant. The source of the pass transistor is coupled to a common source line (CSL) that is shared among NVM cells of a sector of NVM cells. The operation may be performed by applying a first signal to a word line (WLS) coupled to a gate of a memory transistor of the NVM cell and applying a second signal to a bit line (BL) coupled to a drain of the memory transistor of the NVM cell.

RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional Application No.62/232,286, filed on Sep. 24, 2015, the content of which is herebyincorporated by reference herein.

BACKGROUND

Non-volatile memory (NVM) devices are currently in widespread use inelectronic components that require the retention of information whenelectrical power is unavailable. Non-volatile memory devices may includeread-only-memory (ROM), programmable-read-only memory (PROM),erasable-programmable-read-only memory (EPROM), andelectrically-erasable-programmable-read-only-memory (EEPROM) devices.Some memory arrays utilize transistors and gate structures which mayinclude a charge trapping layer. The charge trapping layer may beprogrammed to store data based on voltages applied to or received by thememory array.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure is illustrated by way of example, and not by wayof limitation, in the figures of the accompanying drawings.

FIG. 1 is a block diagram illustrating a non-volatile memory system,according to an embodiment.

FIG. 2 illustrates a selected sector of a non-volatile memory arrayduring an erase operation, according to one embodiment.

FIG. 3 illustrates a selected sector of a non-volatile memory arrayduring a program operation, according to one embodiment.

FIG. 4 illustrates a selected sector of a non-volatile memory arrayduring a read operation, according to one embodiment.

FIG. 5 illustrates a fabrication process of a non-volatile memory arraythat includes an asymmetric pass transistor, according to oneembodiment.

FIG. 6 is a flow diagram illustrating a program operations performed onan non-volatile memory cell, according to an embodiment.

FIG. 7 is a block diagram illustrating a non-volatile memory system,according to another embodiment.

DETAILED DESCRIPTION

Voltage signals are used in the operation of non-volatile memory (NVM)devices, such as flash memory or phase-change memory. NVM devices mayinclude one or more NVM cells. An NVM cell may be a unit of memorycapable of storing a single data value (e.g., a single bit, such as alogical “0” or logical “1”). An NVM cell may, for example, be atwo-transistor (2T) non-volatile memory (NVM) cell including a passtransistor and a memory transistor. A pass transistor may be afield-effect transistor (FET), such as a metal-oxide-semiconductorfield-effect transistor (MOSFET), used as a switch to control voltagelevels and or current levels at nodes of the NVM cell (e.g., at thesource and or drain of pass transistor and or memory transistor). Thememory transistor may be a transistor that stores a bit of binaryinformation, for example by varying the charge stored in a chargetrapping layer of the memory transistor.

Some NVM arrays may use dedicated source line (DSL) architecture. DSLarchitecture may include dedicated source lines for each column of NVMcells in an NVM array (or each column of NVM cells in an NVM sector ofan NVM array). Common source line (CSL) architecture allows for sharedsource lines between multiple rows and/or columns of NVM cells. Forexample, CSL architecture may share a CSL between substantially all theNVM cells in a sector of NVM cells. In other examples, CSL architecturemay share a CSL between substantially all the NVM cells in an NVM array.In another example, CSL architecture may share a CSL between two or morerows and or two or more columns of NVM cells in an NVM sector or array.The implementation of CSL architecture allows for a reduction of siliconarea used for each memory cell.

A set of voltage differentials between the different terminals (e.g.,gate to drain, gate to source, gate to well, or source to drain) may beapplied to the transistors of an NVM cell of a memory device (NVMdevice) to perform different operations (e.g., pre-program, erase,program, and or read). The NVM device may implement a CSL shared betweentwo columns of NVM cells of a NVM sector, for example. The set ofvoltage differentials between different terminals of the transistors ofan NVM cell using CSL architecture may cause and or accentuate leakagecurrents (i.e., non-ideal and or undesirable current across regions andor terminals of a transistor, such as across the channel of atransistor). For example, during a programming operation (i.e., programthe NVM cell to logical “1” or logical “0”) on an NVM cell using CSLarchitecture, subthreshold leakage current (I_(SubVt)) from the sourceto the drain of the pass transistor may occur. Subthreshold leakagecurrent may be current across the channel (e.g., between source anddrain) of a transistor when the transistor is off (e.g., the voltagefrom gate to drain is below the voltage threshold (VT) of thetransistor). The subthreshold leakage current may travel from the sourceof the pass transistor of an NVM cell through the channel of the passtransistor to the source of the memory transistor of the NVM cell, andfrom the source of the memory transistor through the channel of thememory transistor to the bit line, and from the bit line to the chargepump of the memory device. During the programming operation, aneighboring NVM cell sharing a CSL with the programmed NVM cell isinhibited (i.e., preventing an erased NVM cell (e.g., logical “0”) frombecoming programmed (e.g., logical “1”) during a program operation). Theinhibited cell may also have a leakage current, such as gate-induceddrain leakage current (I_(GIDL)). Gate-induced drain leakage current maybe leakage current in a transistor due to a large field effect at thedrain junction of the transistor. Gate-induced drain leakage current maytravel from the drain of the memory transistor of an inhibited NVM cellthrough the channel of the memory transistor to the drain of the passtransistor of the inhibited NVM cell, from the drain of the passtransistor to the well of the pass transistor, from the well of the passtransistor to the substrate, and from the substrate to a charge pump ofthe memory device. Some leakage currents, such as I_(SubVt) andI_(GIDL), may increase as the minimum feature size of the semiconductorprocess shrinks and transistors become smaller. Increased leakagecurrents may result in silicon area penalties (e.g., making the chargepump larger to compensate for sinking large leakage currents) and orreliability problems with NVM cells (e.g., shifting a VT of one or moretransistors of an NVM cell). Additionally, designers often encountertrade-offs when reducing leakage currents. For example, designers maydecrease the subthreshold leakage current by raising the VT of the passtransistor, which may increase gate-induced drain leakage current of aneighboring NVM cell.

The present disclosure addresses the above-mentioned and otherdeficiencies by performing an operation a two-transistor (2T)non-volatile memory (NVM) cell implemented using a CSL. The 2T NVM cellincludes a memory transistor and an asymmetric pass transistor that hasa source with a halo implant. During a program operation on the NVM cellusing an asymmetric pass transistor, subthreshold leakage current acrossthe programmed NVM cell may be reduced without increasing thegate-induced drain leakage current.

In one embodiment, a 2T NVM cell is coupled to a CSL shared with NVMcells of a sector of a memory device. A sector or NVM sector may be ablock of an NVM array containing multiple of NVM cells (i.e., multiplerows of NVM cells and multiple columns of NVM cells). A memory array mayinclude one or more sectors. The 2T NVM cell includes a memorytransistor and a pass transistor. The pass transistor is an asymmetrictransistor including a source with a halo implant. An asymmetrictransistor may be a transistor that includes a source and a drain (orareas around the source and drain) that have different materials and ordifferent amounts of a material. In one example, an asymmetric passtransistor has a source with a halo implant and a drain without a haloimplant. In another example, an asymmetric pass transistor has a sourcewith a strongly doped halo implant with an implant dose in the range of1e13 to 1e14 atoms/cm² and a drain with a lightly doped halo implantwith an implant dose in the range of 1e13 atoms/cm² or less. A haloimplant (also referred to a “pocket implant”) is an implant of amaterial surrounding, at least in part (e.g., below and or around and orto the sides), a region (e.g. source and or drain) of a transistor. Thehalo implant is a material with a conductivity type opposite of theregion (e.g., p-type halo implant around n-type region). A halo implantmay extend under part of the gate of a transistor and implantation ofthe halo implant may be performed after the gate of transistor has beenformed.

In another embodiment, a program operation is performed on a 2T NVM cellthat is coupled to a CSL shared with NVM cells of a sector of a memorydevice. The 2T NVM cell includes a memory transistor and a passtransistor. The pass transistor is an asymmetric transistor including asource with a halo implant. The halo implant at the source of the passtransistor is formed as part of a process step of a baseline fabricationprocess and no additional mask may be used. A baseline fabricationprocess (also referred to as “baseline logic process”) may refer tostandard semiconductor manufacturing process (e.g., process steps) andequipment associated with a particular semiconductor technology node(e.g., 65 nanometer (nm)). A process that deviates from a baselinefabrication process may add additional processing steps and or useadditional masks. The NVM cell is a silicon oxide nitride oxide silicon(SONOS) memory cell. During the program operation, a first signal isapplied to a word line (WLS) coupled to a gate of the memory transistorof the 2T NVM cell. A second signal is applied to a bit line (BL)coupled to a drain of the memory transistor of the 2T NVM cell and to awell line (SPW) coupled to a well of the memory transistor and a well ofthe pass transistor. The first signal and the second signal form apositive voltage potential between the gate and the drain of the memorytransistor and between the gate and the well of the memory transistor,where the positive voltage potential programs the NVM cell. During theprogramming operation, the halo implant at the pass transistor reducesthe subthreshold leakage current of the programmed NVM cell withoutincreasing the gate-induced drain leakage current of the inhibited NVMcell that shares the CSL with the programmed NVM cell.

FIG. 1 is a block diagram illustrating a non-volatile memory system,according to an embodiment. NVM system 100 may include a processingdevice 104 coupled to NVM device 102 via address bus 106, data bus 108,and control bus 110. It will be appreciated by those skilled in the artthat the NVM system 100 has been simplified for the purpose ofillustration, and not intended to be a complete description. Inparticular, details of the processing device 104, row decoder 114,column decoder 118, sense amplifiers 122, and command and controlcircuitry 124, are not described in detail herein. It should beappreciated that NVM system 100 may include all, some, or morecomponents than illustrated in FIG. 1.

External power supply 150, also referred to as power supply, is coupledto NVM device 102. External power supply 150 may be a power supplyexternal to NVM device 102 and may be used by NVM device 102 to generatevoltage signals, such as high voltage (HV) signals that are above thehighest voltage of the external power supply 150 or below a lowestvoltage of the external power supply 150 (e.g., ground voltage). Forexample, external power supply 150 may supply voltages from 0V to 1.2V.The HV signals may be below 0V or above 1.2V. For purpose ofillustration, and not limitation, the following figures will bedescribed as having an external power supply voltage of 0V to 1.2V,unless otherwise stated. It should be appreciated that different powersupply voltage ranges may also be provided, for example 0V to 3V.

Processing device 104 may reside on a common carrier substrate such as,for example, an integrated circuit (“IC”) die substrate, a multi-chipmodule substrate, or the like. Alternatively, the components ofprocessing device 104 may be one or more separate integrated circuitsand/or discrete components. In one exemplary embodiment, processingdevice 104 is the Programmable System on a Chip (PSoC®) processingdevice, developed by Cypress Semiconductor Corporation, San Jose, Calif.Alternatively, processing device 104 may be one or more other processingdevices known by those of ordinary skill in the art, such as amicroprocessor or central processing unit, a controller, special-purposeprocessor, digital signal processor (“DSP”), an application specificintegrated circuit (“ASIC”), a field programmable gate array (“FPGA”),or the like.

NVM device 102 includes memory array 112, such as an NVM array,organized as rows and columns of non-volatile memory cells (not shown inthis figure) as described below. Memory array 112 is coupled to rowdecoder 114 and/or command and control circuitry 124 via multiple selectlines and read lines (at least one select line and one read line foreach row of the memory array). Memory array 112 is further coupled tocolumn decoder 118 via multiple bit lines 120 (one each for each columnof the memory array). It will be appreciated that CSLs may beimplemented as part of the multiple select lines and read lines and/orthe multiple bit lines. Memory array 112 may be coupled to multiplesense amplifiers 122, via column decoder 118, to read multi-bit wordstherefrom. NVM device 102 further includes command and control circuitry124 to receive signals from processing device 104 and sends signals torow decoder 114, control column decoder 118, sense amplifiers 122,control sector select circuit 140, and control voltage signals appliedto memory array 112. Command and control circuitry 124 includes voltagecontrol circuitry 126 for memory array 112 with asymmetric passtransistors to generate and control the voltage signals for operation ofNVM device 102, which may be routed through voltage control circuitry126 to column decoder 118, sense amplifiers 122, and/or sector selectorcircuit 140. Voltage control circuitry 126 operates to apply appropriatevoltages, including HV signals and low voltage (LV) signals, to thememory cells during pre-program, erase, program, and read operations.

Command and control circuitry 124 may be configured to select a firstrow of memory array 112 for a program operation by applying a voltage toa first select line in the first row and to deselect a second row of thememory array by applying another voltage to a second select line in thesecond row. Command and control circuitry 124 may be further configuredto control column decoder 118 to select a memory cell in the first rowfor programming by applying a voltage to a first bit line in a firstcolumn, and to inhibit an unselected memory cell in the first row fromprogramming by applying another voltage to a second bit line in a secondcolumn. Command and control circuitry 124, in particular voltage controlcircuitry 126, may be further configured to apply a voltage to one ormore common source lines that may be coupled to memory cells included inmemory cell array 112 as described below.

NVM device 102 may be a storage device configured to store data valuesin various low-power and non-volatile contexts. For example, NVM device102 may be included in a small area flash memory which may beimplemented in devices or systems such as smart cards or bank cards.Accordingly, memory devices as disclosed herein, such as NVM device 102,may be implemented to have a relatively small area which may befabricated using advanced processing nodes, such as a 65 nm node orlower. Moreover, as discussed in greater detail below, NVM device 102may include various memory cells (not shown) configured to store datavalues. The memory cells may be implemented with a common source line toreduce the overall footprint of each memory cell. Each memory cell mayalso be compatible with Fowler-Nordheim programming techniques.

Memory array 112 may include one or more NVM sectors, such as sector A131 though sector N 132. Each sector may have any number of rows andcolumns of NVM cells, for example 4096 columns and 256 rows. Rows mayinclude multiple NVM cells arranged horizontally. Columns may includemultiple NVM cells arranged vertically. Memory array 112 may use aglobal bit line (GBL) shared by all the sectors of memory array 112.Each column of memory array 112 may have a GBL. For example, aparticular GBL for column 0 shared by all of the sectors (e.g., sector A131 through sector N 132) will be coupled to each row of memory array112 in column 0 of all the sectors. The GBL is configured to providevoltage signals to the sectors of memory array 112 during programoperations and erase operation, but not during read operations.

Memory array 112 may use sector select circuit 140 to couple the GBL toan associated bit line (BL) of a column of a particular sector. Eachcolumn in a sector may have an associated BL particular to that sectorthat is not shared by other sectors. Each column in a sector may have asector select circuit 140 to selectively couple the GBL to theassociated BL. For example, a sector select circuit 140 for column 0 ofsector A 131 may be used as a switch to couple the voltage signal on GBLof column 0 of memory array 112 to the BL for column 0 of sector A 131during erase operations and program operations.

Memory array 112 may also use sector select circuit 140 to couple acolumn of NVM cells in a sector to sense amplifiers 122 during a readoperation. For example, a sector select circuit 140 for column 0 ofsector A 131 may be used as a switch to couple the NVM cells of column 0of sector A to sense amplifiers 122 during a read operation.

It should be appreciated that terms “rows” and “columns” of a memoryarray are used for purposes of illustration, rather than limitation. Inone embodiment, rows are arranged horizontally and columns are arrangedvertically. In another embodiment, rows and columns of memory array 112may be arranged in any orientation.

In one embodiment, an NVM cell may be a two transistor (2T) memory cell.In a 2T memory cell, one transistor may be a memory transistor, whileanother transistor may be a pass transistor. In other implementationsthe NVM cell may include another number of transistors, such as a singlememory transistor (1T), a three transistor memory cell, or otherwise.NVM cells, such as NVM cell 201, 212, 215, and 218 of FIG. 2, will bediscussed below in regards to at least FIG. 2-4.

In one embodiment, memory array 112 may be implemented using chargetrapping memory transistors. Charge trapping memory transistors may beimplemented to utilize transistors and gate structures that include acharge trapping layer. The charge trapping layer may be an insulatorthat is used to trap charge. The charge trapping layer may be programmedto store data based on voltages applied to or received by the memoryarray 112. In this way, a memory array 112 may include various differentNVM cells arranged in rows and columns, and each NVM cell may be capableof storing at least one data value (e.g., bit). Voltages may be appliedto each of the NVM cells to pre-program the NVM cell, program the NVMcell (e.g., program operation—store a logic “1”), erase the NVM cell(e.g., erase operation—store a logic “0”), or read the NVM cell (e.g.,read operation). It should be appreciated that memory array 112 may beimplemented using different types of memory transistors, such asfloating gate memory transistors.

In one embodiment, the charge trapping memory transistors may beimplemented using different materials. One example of a charge trappingmemory transistor is a silicon-oxide-nitride-oxide-silicon (SONOS) typetransistor. In a SONOS type transistor, the charge trapping layer of thememory transistor may be a nitride layer, such as a layer of siliconnitride. Moreover, the charge trapping layer may also include othercharge trapping materials such as silicon oxy-nitride, aluminum oxide,hafnium oxide, hafnium aluminum oxide, zirconium oxide, hafniumsilicate, zirconium silicate, hafnium oxy-nitride, hafnium zirconiumoxide, lanthanum oxide, or a high-K layer. The charge trapping layer maybe configured to reversibly trap or retain carriers or holes injectedfrom a channel of the memory transistor, and may have one or moreelectrical characteristics reversibly changed, modified, or alteredbased on voltages applied to NVM cell. In another embodiment, differenttypes of charge trapping memory transistors may be used. For purposes ofillustration, and not limitation, the operation of NVM cells in thedisclosure will be described with respect to a SONOS type transistor. Itshould be appreciated that other types of NVM transistors may beimplemented using the disclosure herein.

FIG. 2 illustrates a selected sector of a non-volatile memory arrayduring an erase operation, according to one embodiment. NVM sector 200illustrates various bias voltage levels applied to a selected sectorduring an erase operation. A selected sector may be a sector of a memoryarray selected for a particular operation, in this case for an eraseoperation. During an erase operation, one or more rows of NVM cells of asector may be erased to read a logical “0”. Also during an eraseoperation, one or more rows of NVM cells of a selected sector may not beerased (e.g., deselected row of selected sector). For example, FIG. 2illustrates bias voltage levels to erase row 281, but not erase row 282.

NVM sector 200 contains two rows, row 281 containing NVM cell 201 andNVM cell 212, and row 282 containing NVM cell 215 and NVM cell 218. NVMsector 200 contains two columns, column 283 and column 284, which shareCSL 240. It should be appreciated that for purposes of illustration, andnot for limitation, NVM sector 200 is shown with two rows and twocolumns. An NVM sector may include the same, more, or less rows and thesame, more, or less columns than illustrated in FIG. 2.

NVM sector 200 illustrates multiple horizontal (row) signal lines andmultiple vertical (column) signal lines. Horizontal signal lines includelines 231 (WLS), 232 (WL), 270 (SPW), 233 (WLS), 234 (WL), and 271(SPW). Vertical signal lines include lines 238 (BL) and 239 (BL).Another signal line, the common source line (CSL) 240, is shared by allthe NVM cells of column 283 and column 284, including NVM cell 201, NVMcell 212, NVM cell 215, and NVM cell 218. Well lines 270 (SPW), 271(SPW) may be coupled to a well, such as a P-well or an N-well, of thetransistors. A well may be a material doped with p-type and/or n-typeions. A well may be isolated from the substrate (also referred to as thebulk). For example, the well lines may be coupled to a P-well of atransistor. In another embodiment, the well lines may be coupled to thesubstrate (which may be coupled to the well). It should be appreciatedthat the voltages applied to the signal lines, as illustrated in FIG. 2through FIG. 4, may be electrically coupled to, applied by, controlledby, and/or sourced by voltage control circuitry 126 of FIG. 1.

The NVM cells 201, 212, 215, and 218 are 2T NVM cells that include amemory transistor and a pass transistor. NVM cell 201 includes memorytransistor 202 and pass transistor 203. The pass transistors may beasymmetric pass transistors. NVM cell 212 includes memory transistor 214and pass transistor 213. NVM cell 215 includes memory transistor 216 andpass transistor 217. NVM cell 218 includes memory transistor 220 andpass transistor 219. The transistors of the NVM cells 201, 212, 215 and218 may be 4-terminal transistors and include a gate (G)(e.g., gateregion), a source (S) (e.g., source region), a drain (D)(e.g., drainregion), and a well (W)(e.g., well region). For example, memorytransistor 202 of NVM cell 201 includes gate 204, source 205, drain 206,and well 207. Pass transistor 203 of NVM cell 201 includes gate 208,source 209, drain 210, and well 211. Pass transistors 203, 213, 217, and219 may be metal-oxide semiconductor field-effect transistors (MOSFET),such as N-channel MOSFET. Memory transistors 202, 214, 216, and 220 maybe n-type memory transistors. For purposes of illustration, and notlimitation, pass transistors 203, 213, 217, and 219 and memorytransistors 202, 214, 216, and 220 are described as n-type transistors.In other implementation some or all of the pass transistors and ormemory transistors may be p-type transistors. Additionally, it should beappreciated that p-type transistors may have different bias voltages anddifferent polarity of voltage potentials as those depicted in FIGS. 2-4.

In one embodiment, multiple voltage signals may be applied to NVM sector200 to perform the erase operation. A power supply, such as externalpower supply 150 in conjunction with a charge pump, may supply thevoltage signals. It should be appreciated voltage levels of the voltagesignals are for purposes of illustration rather than limitation, and maybe any voltage level and or may be dependent on the particulartechnology node. WLS 231 is at −3V and connects to the gate 204 ofmemory transistor 202 and the gate of memory transistor 214. WL 232 isat 2.5V and connects to the gate 208 of pass transistor 203 and gate ofpass transistor 213. SPW 270 is at 5.5V and connects to the wells of allthe transistors of row 281. WLS 233 is at 5.5V and connects to the gateof memory transistor 216 and the gate of memory transistor 220. WL is at2.5V and connects to the gate of pass transistor 217 and the gate ofpass transistor 219. SPW 271 is at 5.5V and connects to the well of allthe transistors of row 282. BL 238 is 5.5V and connects to the drain 206of memory transistor 202 and the drain of memory transistor 216. CSL 240is at 5.5V and connects to the source 209 of pass transistor 203, andthe sources of pass transistor 213, 217, and 219. BL 239 is at 5.5V andconnects to the drain of memory transistor 214 and memory transistor220.

In one embodiment, the memory transistors 202, 214, 216, and 220 may beNVM transistors, such as charge trapping memory transistors. Memorytransistors 202, 214, 216, and 220 are illustrated having a shaded oxidelayer

In one embodiment, the source region of pass transistors 203, 213, 217,and 219 have halo implants (not shown). Halo implants are illustratedfurther with respect to FIG. 5. In one example, pass transistors 203,213, 217, and 219 are n-type transistors and have halo implants ofp-type that surround the source region (e.g., junction) that is sharedby adjacent pass transistors (e.g., pass transistor 203 shares a sourceregion with pass transistor 213, and pass transistor 217 shares a sourceregion with pass transistor 219). The drains of pass transistors 203,213, 217, and 219 do not have a halo implant and are of n-type material.The source regions of pass transistors 203, 213, 217, and 219 areconnected to CSL 240.

During an erase operation to erase an NVM cell 201 of row 281 of aselected sector, the voltage differential between the gate 204 relativethe well 207 of memory transistor 202 is −8.5V, which causes holes to beinjected from the channel into the charge trapping layer of memorytransistor 202. The erase of memory transistor 202 causes NVM cell 201to read as a logical “0.” Similarly, NVM cell 212 is erased. During theerase operation, NVM cells 215 and 218 of row 282 are not erased as row282 has been deselected and the voltage between the gate and bulk ofmemory transistor 216 and memory transistor 220 is 0V.

It should be appreciated that some of the different voltage levels andelectrical connections illustrated in FIGS. 2-4 may not be describedherein. A person of reasonable skill in the art would be able todetermine the different voltage levels and electrical connections inview of the Figures herein, in particular FIG. 2-4. Further, it shouldalso be appreciated that, apart from the relative voltage levels ofdifferent signal lines, the description with respect to FIG. 2 appliesto FIGS. 3-4, unless otherwise described.

FIG. 3 illustrates a selected sector of a non-volatile memory arrayduring a program operation, according to one embodiment. During aprogram operation on a selected NVM sector 300, one or more NVM cells(e.g., NVM cell 201) of a selected row 281 may be programed to a logical“1” while the remaining NVM cells (e.g., NVM cell 212) on the selectedrow 281 may be inhibited from being programmed and remain erased. TheNVM cells 215 and 218 of deselected rows, such as row 282 may beprevented from changing previously stored data values. A write operationmay include both an erase operation and a program operation.

In NVM sector 300, NVM cell 201 is illustrated as being in selected row281 and being programmed. NVM cell 212 is illustrated as being inhibitedduring the program operation. Leakage currents occurring during theprogram operation are illustrated as subthreshold leakage current 310and gate-induced drain leakage current 312. During programing mode, toprogram NVM cell 201, the voltage signal on BL 238 is −3V, the voltagesignal on WLS is 5.5V, and the voltage signal on SPW 270 is −3V. Apositive voltage potential is developed across the gate 204 and well207, and gate 204 and drain 206 of memory transistor 202. Duringprogramming mode, to inhibit NVM cell 212, voltage control circuitry 126of FIG. 1 controls the voltage signal on BL 239 to be 1.1V. NVM cell 215and 218 are illustrated as being in a deselected row 282 during aprogram operation.

During a program operation to program NVM cell 201, the voltage acrossthe gate 204 relative the well 207 and drain 206 of memory transistor202 is 8.5V. The 8.5V differential injects electrons from the channel ofmemory transistor 202 into the charge trapping layer which causes memorytransistor 202 to be programmed to a logical “1.” Also during theprogram operation to program NVM cell 201, a voltage signal of −3V isapplied to WL 232 which is coupled to the gate 208 of pass transistor203 and the gate of pass transistor 213. A voltage signal of −2.4V isapplied to CSL 240 which is coupled to the source of pass transistor203, 213, 217, and 219.

During the program operation, NVM cell 212 may be inhibited rather thanprogrammed. To inhibit NVM cell 212 during a program operation, voltagecontrol circuitry 126 couples a voltage signal of 1.1V to BL 239. Haloimplants at the source of pass transistor 203 and pass transistor 213reduce the subthreshold leakage current 310. In one example,subthreshold leakage current 310 may be reduced from 100 pico amperes(pA) to 10 pA, or a 10× reduction. The gate-induced drain leakagecurrent 312 may be optimized, for example during the design of NVMsector 300. Gate-induced drain leakage current 312 of NVM cell 212 mayremain substantially unchanged. (e.g., unchanged from between NVMdevices implementing symmetric pass transistors). The implementation ofasymmetric pass transistor may increase the VT of the pass transistor203 and 213, for example. NVM device implementing asymmetric passtransistors may not incur the trade-off of decreasing subthresholdleakage current 310, while increasing gate-induced drain leakage current312. For example, if instead of using an asymmetric pass transistor thesubthreshold leakage is reduced by increasing channel doping, the GIDLcurrent may increase significantly (e.g., up to 100 pA). The passtransistors 203, 213, 217, and 219 are described as asymmetric passtransistors. It should be appreciated that all, some, or none of thepass transistors of NVM sector 300 may be asymmetric.

FIG. 4 illustrates a selected sector of a non-volatile memory arrayduring a read operation, according to one embodiment. During a readoperation of a selected NVM sector 400, the logical values of one ormore NVM cells may be read. During a read operation of selected NVMsector 400, the gates of the memory transistors 202, 214, 216, and 220may be grounded. An erased memory transistor may have a current flowduring the read operation. The current is sensed by sense amplifiers 122of FIG. 1, which registers a logical “0” for the particular NVM cell. Aprogrammed memory transistor has substantially no current flowing duringa read operation. Sense amplifiers 122 will sense substantially nocurrent from the programmed NVM cell and register a logical “1” for theparticular NVM cell.

During the read operation of NVM cell 201, a voltage signal of 2.5V maybe applied to WL 232 and coupled to the gate 208 of pass transistor 203and the gate of pass transistor 213, while 0V may be applied to CSL 240.0V may also be applied to WLS 231 coupled to the gate 204 of memorytransistor 202 and the gate of memory transistor 214. Voltage on BL 238may fluctuate from 0V to 0.6V, depending on whether the read NVM cell isa logical “0” or “1.”

FIG. 5 illustrates a fabrication process of a non-volatile memory arraythat includes an asymmetric pass transistor, according to oneembodiment. Baseline fabrication process 500 illustrates process 501,502, 503, and 504 (also referred to as operation). It should beappreciated that baseline fabrication process 500 is provided forpurposes of illustration rather than limitation. Baseline fabricationprocess may include the same, more, or less processes, and or processesin a different order.

Process 501 may be subsequent additional fabrication (not shown)processes of baseline fabrication process 500. Process 501 illustratestwo NVM cells, NVM cell 201 and 212. NVM cell 201 includes memorytransistor 202 and pass transistor 203 and NVM cell 212 includes memorytransistor 214 and pass transistor 213. NVM cell 201 and 212 are furtherdescribed with respect to FIGS. 2-4. Well 510 and well 511 may be p-typewells and are under memory transistor 202 and 214, respectively. Well512 may be a p-type well and is under and is shared by pass transistor203 and 213. Process 501 illustrates pass transistor 203 and 213 assymmetric pass transistors. Well 513 (also referred to as deep n-well)is beneath the wells of the preceding layer and may be an n-type well.Substrate 514 may be a p-type substrate. Process 501 may be a poly gateetch process related to the formation of the gates of the transistorsfor NVM cell 201 and 212. Process 502 may be a lightly doped drainprocess (SLDD) that implants n-type ions into source and drain regionsof the transistors of NVM cell 201 and 212. Shared source region 521 isshared between pass transistor 203 and 213 and receives n-type implants.

Process 503 may be also be a lightly doped drain process (NLDD) thatimplants n-type ions into the source region (e.g., shared source region521) of the pass transistor 203 and 213.) In one embodiment, in SLDD andNLDD the implant doses and energy may be different and may be optimizedfor each region (e.g., source and drain of a transistor). The NLDDimplant may be part of the baseline fabrication process 500 and use mask530 as part of the implantation process. Process 503 of baselinefabrication process 500 may leverage the mask of the NLDD implant toperform a halo implant 531 around the shared source region 521 of passtransistor 203 and 213, without implanting halo implants in otherregions, such as the drain region of pass transistor 203 and 213. Thehalo implant 531 may be high-tilt halo implants that are performed at anangle so the halo implant 531 is implanted at least partially under thegate of pass transistor 203 and 213. Halo implant 531 may be a p-typematerial. The implantation of halo implant 531 is performed at the CSLside of the NVM cell 201 and NVM cell 212, and not performed at thedrain region of pass transistor 203 and 213 (or a lightly doped haloimplant at the drain region of pass transistor 203 and 213), making passtransistor 203 and 213 asymmetric pass transistors. Halo implant 531 mayleverage mask 530 of an existing process (NLDD) without adding anadditional process step to baseline fabrication process 500. In anotherembodiment, an additional mask (not shown) and or process step may beused to implant halo implant 531.

In one embodiment, in process 502 the drain region and source region ofboth memory transistor 202 and 214 and pass transistor 203 and 213 arelightly doped with an n-type implant dose in the range of 1.0×10¹³ to1.0×10¹⁴ atoms per cm2 (which may be optimized for SONOS performance).At process 503, an additional n-type LDD (NLDD) implant with an implantdose level in the range of 1.0×10¹⁴ to 1.0×10¹⁵ atoms per cm2 and p-typehalo implant 521 (opposite dopant type of LDD implant) with an implantdose of 1.0×10¹³ atoms per cm2 to 1.0×10¹⁴ (e.g., strongly doped haloimplant) and a tilt angle of 30 to 45 degree will be added into theasymmetric source side (e.g., shared source region 521) by modifying theexisting implant mask. The additional NLDD implant and halo implant 521may be one of baseline implants normally optimized for a core CMOSregion.

Process 504 may add one or more spacers between the gates of thetransistors on NVM cell 201 and NVM cell 212 and add n-type ions to thesource and drain regions of the transistors on NVM cell 201 and NVM cell212. Additional subsequent steps may be added to baseline fabricationprocess 500.

In one embodiment, baseline fabrication process 500 includes implantinga first material of a first conductivity type at a source 521 of a passtransistor 201 of a two-transistor (2T) non-volatile memory (NVM) cell201, wherein the 2T NVM cell 201 includes a memory transistor 202 andthe pass transistor 203. Baseline fabrication process 500 furtherincludes implanting a second material of a second conductivity typearound at least part of the source 521 of the pass transistor 2013 toform a halo implant 531. The first conductivity type of the firstmaterial and the second conductivity type of the second material areopposite conductivity types. The pass transistor 203 is an asymmetrictransistor. In one embodiment, asymmetric pass transistor 203 includes asource 521 with the halo implant 531 and a drain without the haloimplant. Baseline fabrication process 500 may include forming a commonsource line (CSL) coupled to the source 521 of the pass transistor 203.The CSL is shared among NVM cells of a sector of NVM cells. In anotherembodiment, the first material is implanted at the source 521 of thepass transistor 203 by forming a lightly doped drain (LDD) at the source521 of the pass transistor 203. In another embodiment, a same mask isused during the implanting of the first material and the implanting thesecond material.

FIG. 6 is a flow diagram illustrating a program operations performed onan non-volatile memory cell, according to an embodiment. It should beappreciated that other operation may be performed, such as apre-program, an erase operation, a program operation, and a readoperation. It should be appreciated that only some of the voltagesignals are described for each operation. Additional voltage signals forother operations are described in regards to FIGS. 2-4. It should alsobe appreciated that features of FIG. 1-5 may be described below to helpillustrated method 600. Method 600 may be performed by processing logicthat comprises hardware (e.g., circuitry, dedicated logic, programmablelogic, microcode), software (e.g., instructions run on a processingdevice to perform hardware simulation), or a combination thereof. In oneembodiment, processing device 104 and/or part or all of non-volatilememory device 102, such as/voltage control circuitry 126, as shown inFIG. 1 may perform some or all the operations described herein.

Method 600 begins at block 605 where processing logic performing themethod performs an operation on a 2T NVM cell, such as NVM cell 201, ofNVM device 102. The operation may be a program operation illustratedwith respect to FIG. 3. The pass transistor 203 of NVM cell 201 is anasymmetric transistor, for example an asymmetric transistor having ahalo implant at source 209 and no halo implant at drain 210. Passtransistor 203 is coupled to CSL 240 which is shared with NVM cell 201,212, 215, and 218. At block 610, programming logic applies a voltagesignal to WLS 231 of 5.5V. WLS 231 is coupled to gate 204 of memorytransistor 202 of NVM cell 201. At block 615, programming logic appliesa voltage signal to BL 238 of −3V. BL 238 is coupled to drain 206 ofmemory transistor 202 of NVM cell 201. At block 620, programming logicapplies a voltage signal to SPW 270 of −3V. SPW 270 is coupled to well207 of memory transistor 202 of NVM cell 201. A positive voltagepotential of 8.5V is formed between gate 204 and drain 206 and betweengate 204 and well 207 of memory transistor 202 to program NVM cell 201.At block 625, processing logic applies a voltage signal to WL 232 of−3V. WL 232 is coupled to the gate 208 of pass transistor 203 of NVMcell 201. At block 630, processing logic applies a voltage signal to CSL240 of −2.4V. The CSL 240 is coupled to the source 209 of passtransistor 203. The voltage potential between gate 208 and source 209 ofpass transistor is −0.6V, which is below the threshold voltage of passtransistor 203. The threshold voltage of pass transistor 203 may beapproximately 0.6V.

It should be appreciated that although a program operation has beenprovided above, other operations may be performed on a sector of NVMcells implementing asymmetric pass transistors. For example, asillustrated in FIG. 2, an erase operation may be performed on NVM cell201 by processing logic applying a voltage signal to SPW 270 of 5.5V.SPW 270 is coupled to well 207 of memory transistor 202 and well 211 ofpass transistor 203 of NVM cell 201. A negative voltage potential isformed between gate 204 and well 207 and between gate 204 and drain 206of memory transistor 202 to erase (logical “0”) NVM cell 201 (as well aserase NVM cells of row 281). In another example, as illustrated in FIG.4, a read operation may be performed o NVM cell 201. Processing logicmay apply a voltage signal to WL 232 of 2.5V. WL 232 is coupled to gate208 of pass transistor 203 of NVM cell 201. Processing logic may apply avoltage signal to CSL 240 of 0V (e.g., ground voltage). A positivevoltage may be coupled between the gate 208 and source 209 of passtransistor 203 to turn “on” the pass transistor (e.g., a voltage abovethe VT of pass transistor 203).

FIG. 7 is a block diagram illustrating a non-volatile memory system,according to another embodiment. Circuit 700 is another NVM system inwhich the current disclosure may operate. Circuit 700 includes a memoryarray with asymmetric pass transistors.

Embodiments of the present invention include various operationsdescribed herein. These operations may be performed by hardwarecomponents, software, firmware, or a combination thereof.

Although the operations of the methods herein are shown and described ina particular order, the order of the operations of each method may bealtered so that certain operations may be performed in an inverse orderor so that certain operation may be performed, at least in part,concurrently with other operations. In another embodiment, instructionsor sub-operations of distinct operations may be in an intermittentand/or alternating manner. The terms “first,” “second,” “third,”“fourth,” etc. as used herein are meant as labels to distinguish amongdifferent elements and may not necessarily have an ordinal meaningaccording to their numerical designation.

The above description sets forth numerous specific details such asexamples of specific systems, components, methods, and so forth, inorder to provide an understanding of several embodiments of the presentinvention. It may be apparent to one skilled in the art, however, thatat least some embodiments of the present invention may be practicedwithout these specific details. In other instances, well-knowncomponents or methods are not described in detail or are presented insimple block diagram format in order to avoid unnecessarily obscuringthe present invention. Thus, the specific details set forth are merelyexemplary. Particular implementations may vary from these exemplarydetails and still be contemplated to be within the scope of the presentinvention.

1. A method comprising: performing an operation on a non-volatile memory(NVM) cell of a memory device, wherein a pass transistor of the NVM cellis an asymmetric transistor comprising a source with a halo implant,wherein the source of the pass transistor is coupled to a common sourceline (CSL) that is shared among NVM cells of a sector of NVM cells, andwherein the operation comprises: applying a first signal to a word line(WLS) coupled to a gate of a memory transistor of the NVM cell; andapplying a second signal to a bit line (BL) coupled to a drain of thememory transistor of the NVM cell.
 2. The method of claim 1, wherein theoperation is a programming operation to program the NVM cell, whereinthe operation further comprises: applying the second signal to a wellline (SPW) coupled to a well of the memory transistor and a well of thepass transistor, wherein the first signal and the second signal form apositive voltage potential between the gate and the drain of the memorytransistor and between the gate and the well of the memory transistor.3. The method of claim 1, wherein the operation is a programmingoperation to program the NVM cell, wherein the operation furthercomprises: applying the second signal to a word line (WL) coupled to agate of the pass transistor; and applying a third signal to the commonsource line (CSL) coupled to the source of the pass transistor, whereinthe second signal and the first signal form a voltage potential betweenthe gate and the source of the pass transistor that is below a thresholdvoltage of the pass transistor.
 4. The method of claim 3, wherein asubthreshold leakage current from the source to drain of the passtransistor is reduced by the halo implant.
 5. The method of claim 1,wherein the operation is an erase operation to erase the NVM cell,wherein the operation further comprises: applying the second signal to awell line (SPW) coupled to a well of the memory transistor and a well ofthe pass transistor, wherein the first signal and the second signal forma negative voltage potential between the gate and the drain of thememory transistor and between the gate and the well of the memorytransistor.
 6. The method of claim 1, wherein the operation is a readoperation to read the NVM cell, wherein the operation further comprises:applying a fourth signal to a word line (WL) coupled to a gate of thepass transistor; and applying a fifth signal to the CSL coupled thesource of the pass transistor, wherein the fourth signal and the fifthsignal form a positive voltage potential between the gate and the sourceof the pass transistor.
 7. The method of claim 1, wherein the NVM cellis a two-transistor (2T) NVM cell.
 8. The method of claim 1, wherein thepass transistor comprises a drain without the halo implant.
 9. Themethod of claim 1, wherein the pass transistor comprises the source witha highly doped halo implant and a drain with a lightly doped haloimplant.
 10. The method of claim 1, wherein the NVM cell is a chargetrapping memory cell.
 11. The method of claim 1, wherein the NVM cell isa silicon oxide nitride oxide silicon (SONOS) memory cell.
 12. Anapparatus comprising: a memory transistor of a non-volatile memory (NVM)cell of a memory device, wherein the NVM cell is a charge trappingmemory cell; a pass transistor of the NVM cell, wherein the passtransistor is an asymmetric transistor comprising a source with a haloimplant; and a source line coupled with the source of the passtransistor, wherein the source line is shared among NVM cells of asector of NVM cells.
 13. The apparatus of claim 12, wherein the NVM cellis a two-transistor (2T) NVM cell.
 14. The apparatus of claim 12,wherein the pass transistor comprises a drain without the halo implant.15. The apparatus of claim 12, the halo implant surrounds at least aportion of the source.
 16. (canceled)
 17. The apparatus of claim 12,wherein the pass transistor comprises a halo implant at the drain of thepass transistor that is different form the halo implant at the source ofthe pass transistor.
 18. A system comprising: a non-volatile memory(NVM) array comprising a plurality of NVM cells, wherein an NVM cell ofthe plurality of NVM cells comprises: a memory transistor; a passtransistor coupled to the memory transistor, wherein the pass transistorof the NVM cell is an asymmetric transistor comprising a source with ahalo implant, wherein the NVM cell is a charge trapping memory cell; anda source line coupled to the source of the pass transistor, wherein thesource line is shared among NVM cells of a sector of NVM cells of theNVM array.
 19. The system of claim 18, wherein the NVM cell is atwo-transistor NVM cell.
 20. (canceled)